Charged Particle Optics

Our research group (Deeltjesoptica in Dutch) is operating in the field of charged particle optics, which means that we manipulate beams of electrons, positrons and ions.

Our ambition is to develop improved tools to look at the microscopic world and to invent new methods to create microscopic structures, even down to nanometer size. For that purpose we advance the fundamental understanding of relevant physical phenomena such as electron emission and we design innovative, sometimes revolutionary electron- and ion beam instruments, for the future semiconductor production, as well as for the fabrication of nanostructures. We presently hold the world record for the direct-writing of small structures using a focused electron beam.

Our research group CPO, directed by professor Pieter Kruit, belongs to the Department of Imaging Physics of the Faculty of Applied Sciences.


Research Group CPO
Faculty of Applied Sciences
Delft University of Technology
Lorentzweg 1, 2628 CJ Delft
P.O. Box 5046, 2600 GA Delft
The Netherlands

Tel:  +31 15 2781497
E-mail: j.t.vanvliet(at) 


By car:

from Amsterdam:
- A4 direction The Hague
- keep following until junction "Ypenburg"
- follow A13 in the direction of Rotterdam
- exit Delft-Zuid (TU-Wijk)

from Rotterdam:
- A13 in the direction of The Hague
- exit Delft-Zuid (TU-Wijk)

When using TomTom, punch in ‘Van der Waalsweg 8, 2628 CH Delft’.
This address will lead you to the parking place behind the building.

By public transport:

by train:
- take the train to Delft Central Station
- from Delft Central Station you can take the bus, taxi or just walk
(for more information and traveling schedules, see )

by bus:
- from Delft railway station local bus direction TU Delft


Route info (PDF file). Look for building 22.
To view this map, you need Adobe Acrobat Reader.

Name author: Webmaster ImPhys
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