"Quantum Noise Effects in e-Beam Lithography and M...Lees verder


"Shining light on human breath analysis with quant...Lees verder


"Versatile Structured Illumination Microscopy"Lees verder


"Whole Slide Imaging Systems for Digital Pathology...Lees verder


Individual beam control in multi electon beam syst...Lees verder


Charged Particle Optics

Our research group (Deeltjesoptica in Dutch) is operating in the field of charged particle optics, which means that we manipulate beams of electrons, positrons and ions.

Our ambition is to develop improved tools to look at the microscopic world and to invent new methods to create microscopic structures, even down to nanometer size. For that purpose we advance the fundamental understanding of relevant physical phenomena such as electron emission and we design innovative, sometimes revolutionary electron- and ion beam instruments, for the future semiconductor production, as well as for the fabrication of nanostructures. We presently hold the world record for the direct-writing of small structures using a focused electron beam.

Our research group CPO, directed by professor Pieter Kruit, belongs to the Department of Imaging Physics of the Faculty of Applied Sciences.


Article "Data Fusion at the Nanoscale" of Bernd Rieger and Sjoerd Stallinga published in ERCIM News

09 January 2017

Standard fluorescent light microscopy is rapidly approaching resolutions of a few nanometers when computationally combining information from hundreds of identical structures. They have developed algorithms to combine this information taking into account the specifics of fluorescent imaging.Lees verder


Overwhelming number of visitors at Lichtjesavond for Optics Group

22 December 2016

On Tuesday 13 of december, the Optics group, in collaboration with the European project Photonics4all ( and the SPIE Student Chapter of TUDelft, was present at the Lichtjesavond, a festive evening in Delft. we were overwhelmed by the presence of so many kids and parents who wanted to discover the wonder of Photonics with plenty of hands-on experiments.Lees verder


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